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Journal Articles

Observation of surface modification of multi-layered mirror induced by soft X-ray laser pulse

Nishikino, Masaharu; Ishino, Masahiko; Ichimaru, Satoshi*; Hatayama, Masatoshi*; Hasegawa, Noboru; Kawachi, Tetsuya

Reza Gakkai Dai-483-Kai Kenkyukai Hokoku; Tanhacho Ryoshi Bimu Hassei To Sono Oyo, p.25 - 28, 2015/12

X-ray ablation has been recently achieved using plasma soft X-ray lasers (SXRLs), laser plasma soft X-rays, and X-ray free electron lasers. In order to study the interactions between picosecond SXRL beams and material and multi-layered structure surfaces were irradiated with SXRL pulse. Following irradiation, the substrate surface was observed using a scanning electron microscope and an atomic force microscope. The surface modifications caused by the SXRL beam were clearly seen. The multi-layered mirror is the important component for the EUV lithography. Then, we have started the damage test of multi-layered structure, and the surface modifications caused by the SXRL pulse irradiations were confirmed.

Journal Articles

Development of soft X-ray multilayer laminar-type plane gratings and varied-line-spacing spherical grating for flat-field spectrograph in the 1-8 keV region

Koike, Masato; Ishino, Masahiko; Imazono, Takashi; Sano, Kazuo*; Sasai, Hiroyuki*; Hatayama, Masatoshi*; Takenaka, Hisataka*; Heimann, P. A.*; Gullikson, E. M.*

Spectrochimica Acta, Part B, 64(8), p.756 - 760, 2009/08

 Times Cited Count:9 Percentile:45.01(Spectroscopy)

W/C and Co/SiO$$_{2}$$ multilayer laminar-type holographic plane gratings (groove density 1/1200 lines /mm) in the 1-8 keV region are developed. For the Co/SiO$$_{2}$$ grating the diffraction efficiencies of 0.41 and 0.47 at 4 and 6 keV, respectively, and for the W/C grating 0.38 at 8 keV are observed. Taking advantage of the outstanding high diffraction efficiencies into practical soft X-ray spectrographs a Mo/SiO$$_{2}$$ multilayer varied-line-spacing (VLS) laminar-type spherical grating (1/2400 lines /mm) is also developed for use with a flat field spectrograph in the region of 1.7 keV. For the Mo/SiO$$_{2}$$ multilayer grating the diffraction efficiencies of 0.05-0.20 at 0.9-1.8 keV are observed. The FWHM's of the measured line profiles of Hf-M$$alpha$$$$_{1}$$ (1644.6 eV), Si-K$$alpha$$$$_{1}$$ (1740.0 eV),and W-M$$alpha$$$$_{1}$$ (1775.4 eV) are 13.7 eV, 8.0 eV, and 8.7 eV, respectively. It shows the validity of multilayer lamina-type gratings in the region.

Journal Articles

Hydrogen adsorption on single-walled carbon nanotubes studied by core-level photoelectron spectroscopy and Raman spectroscopy

Tokura, Akio*; Maeda, Fumihiko*; Teraoka, Yuden; Yoshigoe, Akitaka; Takagi, Daisuke*; Homma, Yoshikazu*; Watanabe, Yoshio*; Kobayashi, Yoshihiro*

Carbon, 46(14), p.1903 - 1908, 2008/11

 Times Cited Count:18 Percentile:51.99(Chemistry, Physical)

We have investigated the adsorption of atomic hydrogen on vertically aligned carbon nanotube using ${it in situ}$ synchrotron-radiation-based core-level photoelectron spectroscopy and Raman spectroscopy. From C1s spectra, we identified a peak component due to CH bonds of carbon atoms in single-walled carbon nanotubes. We also found the suppression of $$pi$$-plasmon excitation, indicating that the hydrogen adsorption deforms the bonding structure. Raman spectra of the single-walled carbon nanotubes indicated that the radial-breathing-mode intensities decreased due to the adsorption-induced bonding-structure deformation. Moreover, the decrease for single-walled carbon nanotubes with small-diameter was more severe than that for large-diameter. Our results strongly suggest that the hydrogen adsorption, which induces the structure deformation from sp$$^{2}$$ to sp$$^{3}$$ bonding, depends on the diameter of SWCNTs.

Journal Articles

Fabrication and evaluation of a multilayer laminar-type holographic grating and its application to a high efficiency grazing incidence monochromator for the 1-8 keV region

Koike, Masato; Ishino, Masahiko; Heimann, P. A.*; Imazono, Takashi; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sasai, Hiroyuki*; Gullikson, E. M.*; Sano, Kazuo*

AIP Conference Proceedings 879, p.647 - 650, 2007/01

no abstracts in English

Journal Articles

Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region

Ishino, Masahiko; Heimann, P. A.*; Sasai, Hiroyuki*; Hatayama, Masatoshi*; Takenaka, Hisataka*; Sano, Kazuo*; Gullikson, E. M.*; Koike, Masato

Applied Optics, 45(26), p.6741 - 6745, 2006/09

 Times Cited Count:11 Percentile:48.58(Optics)

no abstracts in English

Journal Articles

Development of multilayer holographic laminar-type diffraction grating having high efficiencies

Koike, Masato

X-sen Ketsuzo Kogaku Nyuzu Reta, (23), p.3 - 4, 2006/03

no abstracts in English

Oral presentation

Fabrication and evaluation of high efficiency W/C multilayered holographic grating

Koike, Masato; Ishino, Masahiko; Sano, Kazuo*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sasai, Hiroyuki*; Heimann, P. A.*; Gullikson, E. M.*

no journal, , 

no abstracts in English

Oral presentation

W/C multilayered laminar-type holographic grating and its application to a high efficiency grazing incidence monochromator for the 1-8 keV region

Koike, Masato; Ishino, Masahiko; Sano, Kazuo*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Heimann, P. A.*; Gullikson, E. M.*; Sasai, Hiroyuki*

no journal, , 

no abstracts in English

Oral presentation

Fabrication and evaluation of a high efficiency W/C multilayered laminar-type holographic grating

Koike, Masato; Ishino, Masahiko; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sano, Kazuo*; Heimann, P. A.*; Gullikson, E. M.*

no journal, , 

no abstracts in English

Oral presentation

Multilayer laminar-type diffraction gratings achieving high diffraction efficiencies in the 1-8 keV energy region

Ishino, Masahiko; Koike, Masato; Heimann, P. A.*; Sasai, Hiroyuki*; Hatayama, Masatoshi*; Takenaka, Hisataka*; Sano, Kazuo*; Gullikson, E. M.*

no journal, , 

no abstracts in English

Oral presentation

High efficiency multilayer laminar-type gratings and their application to a grazing incidence monochromator for the 1-8 keV region

Koike, Masato; Ishino, Masahiko; Heimann, P. A.*; Gullikson, E. M.*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Sasai, Hiroyuki*; Sano, Kazuo*

no journal, , 

no abstracts in English

Oral presentation

Fabrication and evaluation of multilayer laminar-type gratings and their application to high resolution monochromators having variable included angles in keV region

Koike, Masato; Ishino, Masahiko; Sano, Kazuo*; Sasai, Hiroyuki*; Takenaka, Hisataka*; Hatayama, Masatoshi*; Heimann, P. A.*; Gullikson, E. M.*

no journal, , 

no abstracts in English

Oral presentation

Soft X-ray photoelectron spectroscopy study of atomic hydrogen exposure on carbon nanotubes

Tokura, Akio*; Maeda, Fumihiko*; Takagi, Daisuke*; Homma, Yoshikazu*; Yoshigoe, Akitaka; Teraoka, Yuden; Watanabe, Yoshio*; Kobayashi, Yoshihiro*

no journal, , 

no abstracts in English

Oral presentation

Diameter dependence of hydrogen adsorption on single-walled carbon nanotubes

Tokura, Akio*; Maeda, Fumihiko*; Teraoka, Yuden; Yoshigoe, Akitaka; Takagi, Daisuke*; Homma, Yoshikazu*; Watanabe, Yoshio*; Kobayashi, Yoshihiro*

no journal, , 

We have investigated the adsorption of atomic hydrogen on vertically aligned SWNT film. The effects of hydrogen adsorption were investigated by photoelectron spectroscopy and Raman spectroscopy. By fitting C 1s core level spectrum, we found the component attributed to hydrogenation of carbon. The suppression of $$pi$$ plasmons was also found. These results indicate that hydrogen adsorption induced bonding structure deformation. Raman spectra demonstrate that the radial-breathing-mode intensity of small-diameter SWNTs is more severely decreased than that of large-diameter SWNTs. The G-band/D-band ratio also decreased after the irradiation. These results indicate the disordering of graphene on small-diameter SWNTs is induced more easily. Our results indicate that the adsorption coefficient of hydrogen atoms for SWNTs with small diameter is higher than that for SWNTs with large diameter.

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