The Investigation of charge transport properties of SOI semiconductor devices using a heavy ion microbeam

Hirao, Toshio; Laird, J. S.; Mori, Hidenobu*; Onoda, Shinobu*; Ito, Hisayoshi

no abstracts in English

Language	:	English
Journal	:	Solid State Phenomena Vol.78-79
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Pages	:	p.395 - 400
Publication Year/Month	:	2001/07
Meeting title	:	6th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors
Held date	:	2000/11
Location (city)	:	Fukuoka
Location (country)	:	Japan
Patent information	:
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DOI for research data	:
Keywords	:	マイクロビーム; SEU; SOI; Charg Collection; シングルイベント
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Registration No. : B20001499
JAEA Abstracts No. : 290835
Paper Submission No. : 18371

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