Kinetic energy effects of oxygen molecular beams in initial oxidation of silicon surfaces

Teraoka, Yuden; Yoshigoe, Akitaka ; Sano, Mutsumi

no abstracts in English

Language	:	Japanese
Journal	:	Shinku
Volume	:	43
Number	:	3
Pages	:	P. 412
Publication Year/Month	:	2000/03
Meeting title	:	第40回真空に関する連合講演会
Held date	:
Location (city)	:
Location (country)	:
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.3131/jvsj.43.381
DOI for research data	:
Keywords	:	SPring-8; 運動エネルギー; シリコン; 酸化; 光電子分光; 差動排気; 超音速分子線
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:
Altmetrics	:

Registration No. : B19990814
JAEA Abstracts No. :
Paper Submission No. :

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.