A Crystalline hydrogenated carbon film obtained by plasma enhanced chemical vapor deposition

Zhang, Z.*; Narumi, Kazumasa; Naramoto, Hiroshi; Wu, Z.*; Yamamoto, Shunya; Miyashita, Atsumi; Tamada, Masao

no abstracts in English

Language	:	English
Journal	:	Journal of Applied Physics
Volume	:	86
Number	:	3
Pages	:	p.1317 - 1321
Publication Year/Month	:	1999/08
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Paper URL	:	https://doi.org/10.1063/1.370888
DOI for research data	:
Keywords	:	Carbon Film; Hydrogen; Crystalline Film; CVD; Thermal Stability
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Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:48.49 Category:Physics, Applied
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Registration No. : A19990118
JAEA Abstracts No. : 271066
Paper Submission No. : 16843

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