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Report No.

Resonant Auger electron spectroscopy for analysis of the chemical state of phosphorus segregated at SiO$$_{2}$$/Si Interfaces

Oshima, Masaharu*; not registered; Ono, Kanta*; Fujioka, Hiroshi*; not registered; Baba, Yuji; Yoshii, Kenji; Sasaki, Teikichi

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