Resonant Auger electron spectroscopy for analysis of the chemical state of phosphorus segregated at SiO $_{2}$ /Si Interfaces

Oshima, Masaharu*; not registered; Ono, Kanta*; Fujioka, Hiroshi*; not registered; Baba, Yuji ; Yoshii, Kenji ; Sasaki, Teikichi

no abstracts in English

Language	:	English
Journal	:	Journal of Electron Spectroscopy and Related Phenomena
Volume	:	88-91
Number	:
Pages	:	p.603 - 607
Publication Year/Month	:	1998/00
Meeting title	:	7th Int. Conf. on Electron Spectroscopy
Held date	:	1997/09
Location (city)	:	千葉
Location (country)	:
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1016/S0368-2048(97)00169-2
DOI for research data	:
Keywords	:	Resonant Auger Electron Spectroscopy; Phosphorus; SiO $_{2}$ -Si; Interface; Segregation
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:25.68 Category:Spectroscopy
Altmetrics	:

Registration No. : B19970404
JAEA Abstracts No. : 270746
Paper Submission No. : 16559

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.

Resonant Auger electron spectroscopy for analysis of the chemical state of phosphorus segregated at SiO/Si Interfaces

Resonant Auger electron spectroscopy for analysis of the chemical state of phosphorus segregated at SiO $_{2}$ /Si Interfaces