High vacuum pump with all-ceramic rotor assembly,favored for use in magnetic field,high temperature and corrosive gases

no abstracts in English

Language	:	Japanese
Journal	:	Enerugi Fuoramu
Volume	:	0
Number	:	9
Pages	:	112 Pages
Publication Year/Month	:	1989/00
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DOI for research data	:	Link to research data related to this paper/report.
Keywords	:	真空ポンプ; エンジニアリング; セラミックス; 回転体; Seeds
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Registration No. : A19890113
JAEA Abstracts No. :
Paper Submission No. : 9427

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