Surface morphology of TiO $_{x}$ films prepared by an ion-beam-assisted reactive deposition method

Sasase, Masato*; not registered; Yamaki, Takahiro*; Takano, Ichiro*; not registered

no abstracts in English

Language	:	English
Journal	:	Thin Solid Films
Volume	:	281-282
Number	:
Pages	:	p.431 - 435
Publication Year/Month	:	1996/00
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Patent information	:
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Paper URL	:	https://doi.org/10.1016/0040-6090(96)08668-3
DOI for research data	:
Keywords	:	Ion Bombardment; Titanium; Crystallization
Research Facility	:
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Article of JAEA R&D Review	:
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Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:39 Category:Materials Science, Multidisciplinary
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Registration No. : A19960334
JAEA Abstracts No. : 240953
Paper Submission No. : 14342

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Surface morphology of TiO films prepared by an ion-beam-assisted reactive deposition method

Surface morphology of TiO $_{x}$ films prepared by an ion-beam-assisted reactive deposition method