Hot-implantation of nitrogen and aluminumions into SiC semiconductor

Ito, Hisayoshi; Oshima, Takeshi; Aoki, Yasushi; Yoshikawa, Masahito; Nashiyama, Isamu; Okumura, Hajime*; Yoshida, Sadafumi*

no abstracts in English

Language	:	English
Journal	:	14th Symp. on Materials Science and Engineering, Research Center of Ion Beam Technology, Hosei Univ.
Volume	:	0
Number	:
Pages	:	p.147 - 150
Publication Year/Month	:	1995/00
Meeting title	:	第14回法政大学イオンビーム工学研究所シンポジウム
Held date	:	1995/12
Location (city)	:	小金井
Location (country)	:
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Keywords	:	炭化ケイ素(SiC); イオン注入; 欠陥; 不純物; 電子スピン共鳴(ESR); 光励起発光(PL); シート抵抗
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Registration No. : B19951337
JAEA Abstracts No. : 240296
Paper Submission No. : 13810

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