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Report No.

RHEED observation of BaTiO$$_3$$ thin films grown by MBE

Yoneda, Yasuhiro   ; Sakaue, Kiyoshi*; Terauchi, Hikaru*

Ferroelectric BaTiO$$_3$$ thin filmwith a thickness of 10ML were epitaxally grown on SrTiO$$_3$$ (001) substrate by very slow deposition using MBE. The investigation were carried out by two growth methods: (i) codeposition and (ii) alternate deposition. In-situ observation of RHEED confirmed that an epitaxial cube-on-cube structure was prepared. After the deposition, X-ray diffraction measurements were carried out. The 10-ML-thick BaTiO$$_3$$ films were highly ${it c}$-axis oriented single crystals with good film quality.



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Category:Chemistry, Physical



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