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In-situ observation of oxidation of Ti(0001) surface by real-time photoelectron spectroscopy using synchrotron radiation

Takakuwa, Yuji*; Ishizuka, Shinji*; Yoshigoe, Akitaka ; Teraoka, Yuden; Mizuno, Yoshiyuki*; Tonda, Hideki*; Homma, Teiichi*

Temperature dependence of the initial oxidation kinetics of Ti(0001) surface was investigated by low energy electron diffraction (LEED) and real-time photoelectron spectroscopy. The LEED observation revealed that the oxide layers grew epitaxially. From the oxygen uptake curve, it was clarified that oxigen diffusion was significantly enhanced by surface temperature and the oxide layers thickness reached to 7 nm at 400$$^{circ}$$C. From Ti-2p photoelectron spectroscopy, TiO$$_{2}$$ was predominant at the subsurface while TiO and Ti$$_{2}$$O$$_{3}$$ components were also observed at the interface.

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