Fabrication of nanowires using high-energy ion beams

Tsukuda, Satoshi*; Seki, Shuhei*; Tagawa, Seiichi*; Sugimoto, Masaki; Idesaki, Akira; Tanaka, Shigeru; Oshima, Akihiro*

Nano-wire formation in Si-based polymer thin films using a heavy ion beam is discussed in terms of energy density deposition along ion tracks. Gelation of the polymer along the ion track results in cross-linking to produce nano-wires with size and number density controllable by selecting appropriate ion beam characteristics and polymer materials. Ion bombardment of polycarbosilane (PCS), PCS-polyvinylsilane blend polymer, and polymethylphenylsilane produces nano-wires with radii of 30 nm depending on the type of ion beam. The difference in size is shown to be related to the efficiency of the cross-linking reaction considering the deposited energy distribution along the ion tracks.