Language |
: | English |
---|---|---|
Journal |
: | |
Volume |
: | 144-147 |
Number |
: | |
Pages |
: | p.453 - 455 |
Publication Year/Month |
: | 2005/06 |
Meeting title |
: | 14th International Conference on Vacuum Ultraviolet Radiation Physics (VUV-14) |
Held date |
: | 2004/07 |
Location (city) |
: | Cairns |
Location (country) |
: | Australia |
Paper URL |
: |
|
Keywords |
: | レジスト薄膜; 微細加工; 放射光; 照射; Desorption Induced by Electronic Transition; Polarization Angle Dependence; Inner-shell Excitation |
Research Facility |
: |
Accesses |
: |
- Accesses |
---|---|---|
InCites™ |
: |
Percentile:60.67 Category:Spectroscopy |
Altmetrics |
: |
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