Oxidation state during growth of very thin oxide on Ti(0001) surface

Takakuwa, Yuji*; Ishizuka, Shinji*; Yoshigoe, Akitaka ; Teraoka, Yuden; Moritani, Kosuke; Ogawa, Shuichi*; Mizuno, Yoshiyuki*; Tonda, Hideki*; Homma, Teiichi*

The oxidation reaction of Ti(0001) surface by oxygen molecules was observed by real-time in-situ photoemission spectroscopy using synchrotron radiation in the conditions of 400 $^{circ}$ C and 3.710 $^{-6}$ Pa. The uptake curve of oxygen showed a plateau at the dose of 45-85 L and then increased again. This re-growth of oxide film was attributed to the drastic change of Ti oxidation state from TiO to TiO $_{2}$ . Consequently, the characteristic change of the uptake curve was caused by the oxidation state change of Ti atoms.

Language	:	Japanese
Journal	:	Shinku
Volume	:	47
Number	:	6
Pages	:	p.457 - 461
Publication Year/Month	:	2004/06
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Paper URL	:	https://doi.org/10.3131/jvsj.47.457
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Keywords	:	Ti(0001); 酸素分子; 酸化; 光電子分光; その場観察; 吸着曲線; 酸化状態; 酸化膜; リアルタイム計測; 放射光
Research Facility	:	SPring-8(大型放射光施設)
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Registration No. : A20040225
JAEA Abstracts No. : 321015
Paper Submission No. : 21416

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