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Report No.
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Development of a high-energy heavy ion microbeam system at the JAERI AVF cyclotron

Sato, Takahiro; Oikawa, Masakazu*; Sakai, Takuro; Okumura, Susumu; Kurashima, Satoshi; Miyawaki, Nobumasa; Fukuda, Mitsuhiro; Yokota, Wataru; Kamiya, Tomihiro

A focused high-energy heavy ion scanning microbeam system with a spatial resolution of about 1$$mu$$m is being developed at the AVF cyclotron of JAERI-Takasaki. It will provide microbeams to applications such as radiation tolerance testing of semiconductor devices and radio microsurgery in biomedical science with single ion hit technique. The main system components (slits, a beam scanner, quadrupole magnets and so on) had been installed in 2002. Test operations have been carried out since last year. We report the results obtained so far.

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