Surface compositional and chemical-state changes of SiC,Si $_{3}$ N $_{4}$ and SiO $_{2}$ by energetic hydrogens

not registered; not registered

no abstracts in English

Language	:	English
Journal	:	Journal of Nuclear Materials
Volume	:	138
Number	:
Pages	:	p.145 - 148
Publication Year/Month	:	1986/00
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Paper URL	:	https://doi.org/10.1016/0022-3115(86)90269-2
DOI for research data	:
Keywords	:	X-ray Photoelectron Spectroscopy; Auger Electron Spectroscopy; Si; SiC; Si $_{3}$ N $_{4}$ ; SiO $_{2}$ ; Hydrogen Ions
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Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:85.2 Category:Materials Science, Multidisciplinary
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Registration No. : A19855317
JAEA Abstracts No. :
Paper Submission No. : 7668

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Surface compositional and chemical-state changes of SiC,SiN and SiO by energetic hydrogens

Surface compositional and chemical-state changes of SiC,Si $_{3}$ N $_{4}$ and SiO $_{2}$ by energetic hydrogens