Language |
: | Japanese |
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Journal |
: | |
Volume |
: | |
Number |
: | 105 |
Pages |
: | p.12 - 18 |
Publication Year/Month |
: | 2005/03 |
Paper URL |
: |
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Keywords |
: | 炭化ケイ素(SiC); 素子作製プロセス; 高温イオン注入; 酸化後熱処理; 金属-酸化物-半導体電界効果トランジスタ(MOSFET) |
Research Facility |
: |
Accesses |
: |
- Accesses |
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Altmetrics |
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