Development of neutron supermirror with large-scale ion-beam sputtering instrument

Maruyama, Ryuji   ; Yamazaki, Dai  ; Ebisawa, Toru*; Hino, Masahiro*; Soyama, Kazuhiko  

Neutron supermirror has become an important device to transport, bending and focusing a neutron beam. We have developed it using ion beam sputtering (IBS) instrument since it enables us to produce good quality layers with high density and small grain size. We have also investigated ion-polishing technique, which suppresses the interface roughness of multilayers. We have now installed new IBS instrument with effective deposit area of 500 mm in diameter for the realization of supermirror guide and bender with large effective critical angle. In this presentation, the performance of the supermirrors fabricated with it and the future development of neutron optical devices using supermirrors will be discussed.