Effect of surface treatment of Si substrate on the crystal structure of -FeSi film prepared by ion beam sputter deposition (IBSD) method

Sasase, Masato*; Yamamoto, Hiroyuki; Yamaguchi, Kenji; Shimura, Kenichiro

no abstracts in English

Language	:	Japanese
Journal	:	Zairyo Kaihatsu No Tameno Kenbikyoho To Oyo Shashinshu
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Pages	:	P. 194
Publication Year/Month	:	2006/03
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Cooperating Institute	:	若狭湾エネルギー研究センター

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Registration No. : AA20050133
JAEA Abstracts No. :
Paper Submission No. : 1840

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