Modification of optical properties of silicon nitride films on Si(100) by ion beams

Shinde, N.*; Matsunami, Noriaki*; Tazawa, Masato*; Sataka, Masao; Chimi, Yasuhiro

no abstracts in English

Language	:	English
Journal	:	Transactions of the Materials Research Society of Japan
Volume	:	31
Number	:	3
Pages	:	p.709 - 712
Publication Year/Month	:	2006/09
Meeting title	:	第16回日本MRS学術シンポジウム
Held date	:	2005/12
Location (city)	:	東京
Location (country)	:	日本
Patent information	:
PDF	:
Paper URL	:
DOI for research data	:
Keywords	:	no keyword
Research Facility	:	タンデム加速器
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:	名古屋大学

Accesses	:	- Accesses
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Registration No. : BB20050817
JAEA Abstracts No. :
Paper Submission No. : 11992

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