Nitridation reaction dynamics on Ti(0001) surfaces using a supersonic nitrogen molecular beam

Ogawa, Shuichi*; Takakuwa, Yuji*; Ishizuka, Shinji*; Yoshigoe, Akitaka ; Teraoka, Yuden; Mizuno, Yoshiyuki*

In order to study adsorption reaction dynamics of nitrogen molecules at Ti surfaces, Ti(0001) nitridation processes via supersonic nitrogen molecular beams were observed by real-time photoelectron spectroscopy. Incident energy dependence of initial sticking probability was investigated for each adsorption state of nitrogen molecules. The N1s photoemission peak consists of two components. The incident energy dependence of initial sticking probability was obtained from adsorption uptake curves for each component. The two components revealed almost same tendency. It was indicated that dissociative adsorption via a physical adsorption state was a major process in the incident energy less than 0.3 eV, and direct adsorption took place mainly in the incident energy larger than 0.3 eV.