Advanced fabrication method of planar components for plasma diagnostics

Ito, Naoki*; Mase, Atsushi*; Kogi, Yuichiro*; Seko, Noriaki; Tamada, Masao; Shen, Z.*; Yang, L.*; Domier, C. W.*; Luhmann, N. C. Jr.*; Sakata, Eiji*

As the importance of plasma imaging diagnostics increases, the fabrication of high performance millimeter-wave planar components becomes essential. This paper describes the development of high performance millimeter-wave planar components such as antennas and filters using low-loss fluorine substrate. The problems to be solved are low degree of adhesion between copper foil and fluorine substrate and shape of antenna pattern. In order to solve the problems, surface treatment of fluorine films and a fabrication method using Electro Fine Forming (EF2) are utilized.