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AFM investigation on surface evolution of amorphous carbon during ion-beam-assisted deposition

AFMを用いたイオンビーム援用蒸着中の非晶質炭素表面の進展の観察

Zhu, X. D.*; Ding, F.*; 楢本 洋*; 鳴海 一雅

Zhu, X. D.*; Ding, F.*; Naramoto, Hiroshi*; Narumi, Kazumasa

Ne$$^{+}$$イオンを用いたC$$_{60}$$のイオンビーム援用蒸着法により、鏡面研磨したSi(111)ウェハー上に水素フリーの非晶質炭素を作製し、基板温度400$$^{circ}$$Cと700$$^{circ}$$Cにおいて、成長時間による薄膜表面の形状変化を原子間力顕微鏡(AFM)で評価した。表面形状とRMS粗さの解析により、成長するにつれて薄膜表面の粗さが増すことがわかった。成長時間を長くすると、島とピットの協奏的な核生成が出現し、3次元成長をする。400$$^{circ}$$Cにおいては不規則な小山状になり、700$$^{circ}$$Cにおいては細長い小山状になった。さらにその後、400$$^{circ}$$Cでは竹の節状、700$$^{circ}$$Cでは波紋状の構造に発展することが観測された。このような表面形状の進展を解明するためには、スパッタリング効果以外に、非晶質炭素膜中の化学結合の構成を考慮すべきだと考える。

Hydrogen-free amorphous carbons (a-C) have been prepared on mirror-polished Si(111) wafers through thermally evaporated C$$_{60}$$ with simultaneous bombardments of Ne$$^{+}$$ ions. The time evolution of film surfaces has been characterized by atomic force microscopy (AFM) at two temperatures of 400 and 700 $$^{circ}$$C. Based on the topography images and the root-mean-square (rms) roughness analysis, it is found that the a-C surfaces present roughening growth at the initial stage. With increasing growth time, the cooperative nucleation of the islands and pits appears on the surfaces, suggesting three-dimensional growth, and then they continue to evolve to irregular mounds at 400 $$^{circ}$$C, and elongated mounds at 700 $$^{circ}$$C. At the steady growth stage, these surfaces further develop to the structures of bamboo joints and ripples corresponding to these two temperatures, respectively. It is believed that besides ion sputtering effect, the chemical bonding configurations in the amorphous carbon films should be taken into considerations for elucidating the surface evolutions.

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パーセンタイル:39.6

分野:Chemistry, Physical

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