Application to semiconductor device fabrication and evaluation

Ito, Hisayoshi

Radiation application techniques like ion implantation, electron-beam lithography, neutron transmutation doping, etc., are recognized as key technology for fabricating sophisticated semiconductor devices. Ion beams, electron beams, neutron beams and -rays are also used for evaluating the durability and reliability of highly integrated semiconductor devices. In this document, the outlines of radiation applications in the fabrication and evaluation of semiconductor devices are described.