Hexagonal BCN films prepared by RF plasma-enhanced CVD

Mannan, M. A.*; Nagano, Masamitsu*; Hirao, Norie*; Baba, Yuji

Hexagonal boron carbonitride (h-BCN) films have been synthesized on silicon (100) substrate by radio frequency plasma enhanced chemical vapor deposition from tris(dimethylamino)-borane (TDMAB) as a precursor. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy revealed that the film with a composition of B $_{46}$ C $_{18}$ N $_{36}$ had sp $^{2}$ B-C-N atomic hybridization. Near edge X-ray absorption fine structure suggested that the local structure of BCN showed different atomic orientation to the substrate.

Language	:	English
Journal	:	Chemistry Letters
Volume	:	37
Number	:	1
Pages	:	p.96 - 97
Publication Year/Month	:	2008/01
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Paper URL	:	https://doi.org/10.1246/cl.2008.96
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Keywords	:	no keyword
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Cooperating Institute	:	佐賀大学

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Registration No. : AA20071105
JAEA Abstracts No. : 36000528
Paper Submission No. : 3791

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