Investigation of deposit condition in the first stage of -FeSi $_{2}$ homoepitaxial growth

Wakaya, Ippei*; Ochiai, Kunihito*; Udono, Haruhiko*; Nagano, Takatoshi*; Yamada, Yoichi; Yamamoto, Hiroyuki; Esaka, Fumitaka

Deposit condition in the first stage of -FeSi $_{2}$ homoepitaxial growth has been investigated.

Language	:	Japanese
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Meeting title	:	2008年秋季第69回応用物理学会学術講演会
Held date	:	2008/09
Location (city)	:	春日井
Location (country)	:	日本
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Keywords	:	no keyword
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Registration No. : BB20081686
JAEA Abstracts No. :
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Investigation of deposit condition in the first stage of -FeSi homoepitaxial growth

Investigation of deposit condition in the first stage of -FeSi $_{2}$ homoepitaxial growth