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Characterization of BCN films synthesized by radiofrequency plasma enhanced chemical vapor deposition

Mannan, M. A.*; Nagano, Masamitsu*; Kida, Tetsuya*; Hirao, Norie; Baba, Yuji 

Boron carbonitride (BCN) films have been synthesized on Si(100) substrate by radio frequency plasma enhanced chemical vapor deposition using Tris-(dimethylamino)borane (TDMAB) as a precursor. The formation of the sp$$^{2}$$-bonded BCN phase was confirmed by Fourier transform infrared spectroscopy. X-ray photoelectron spectroscopy measurements showed that B atoms were bonded to C and N atoms to form the BCN atomic hybrid configurations. Near-edge X-ray absorption fine structure measurements indicated that B atoms were bonded not only to N atoms but also to C atoms to form various configurations of sp$$^{2}$$-BCN atomic hybrids. The polarization-dependence of NEXAFS suggested that the predominant hybrid configuration of sp$$^{2}$$-BCN films oriented in the direction perpendicular to the Si substrate.

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Category:Chemistry, Multidisciplinary

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