Polarization measurement of evaluation system for soft X-ray optical elements (BL-11) with multilayer polarizers

Imazono, Takashi; Sano, Kazuo*; Suzuki, Yoji; Kawachi, Tetsuya; Koike, Masato

It is important for studies using polarized soft X-rays to obtain the information on the polarization state of polarized light in advance. No supply of polarizing element practicable in the energy region of 0.7-0.9 keV, which is in the vicinity of the L-edges of 3d transition metals, makes it difficult to evaluate the polarization state of the actual light so far. In order to perform polarization measurement, a soft X-ray ellipsometer equipped with six drive shafts for measurement and three ones for alignment has been designed newly and installed to BL-11 beamline, Evaluation System for Soft X-ray Optical Elements, at SR Center, Ritsumeikan University. A result of reflection measurement carried out as a performance test, the reflection profile, peak position, and reflection width of Mo/SiO multilayer polarizer, which has been fabricated newly in this study, obtained by the ellipsometer is well agree with those of the existing reflectometer.