Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas

Sunahara, Atsushi*; Sasaki, Akira; Nishihara, Katsunobu*

We simulated Extreme Ultra-Violet (EUV) emission from laser-produced tin plasmas for the lithography of semi-conductor, using one- and two- dimensional radiation hydrodynamic simulation codes, and benchmarked the simulations by comparison with recent experiments. We successfully reproduced the measured conversion efficiency, X-ray spectra, and plasma density profiles in the experimental conditions. We found self-absorption of radiation due to the large opacity plays an important role in emission.

Language	:	English
Journal	:	Journal of Physics; Conference Series
Volume	:	112
Number	:
Pages	:	p.042048_1 - 042048_4
Publication Year/Month	:	2008/00
Meeting title	:	5th International Conference on Inertial Fusion Sciences and Applications (IFSA 2007)
Held date	:	2007/09
Location (city)	:	Kobe
Location (country)	:	Japan
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1088/1742-6596/112/4/042048
DOI for research data	:
Keywords	:	no keyword
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

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Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:98.33 Category:Physics, Fluids & Plasmas
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Registration No. : BB20082895
JAEA Abstracts No. : 37000490
Paper Submission No. : 5487

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