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Report No.

SR-XPS analysis of SiO$$_{2}$$/SiC interfaces formed by thermal oxidation of 4H-SiC(000$$bar{1}$$) surfaces

Kirino, Takashi*; Kagei, Yusuke*; Okamoto, Gaku*; Harries, J.; Yoshigoe, Akitaka ; Teraoka, Yuden; Mitani, Shuhei*; Nakano, Yuki*; Nakamura, Takashi*; Hosoi, Takuji*; Shimura, Takayoshi*; Watanabe, Heiji*

In order to study the origin of degradation for interface chracteristics and reliability of SiC(0001)C surfaces, chemical bonding states at SiO$$_{2}$$/SiC interfaces made on (000$$bar{1}$$)$$_{Si}$$ and (000$$bar{1}$$)$$_{C}$$ surfaces have been analyzed by using a synchrotron radiation XPS method. Si2p$$_{3/2}$$ components were extracted from Si2p photoemission peaks. Sub-oxidea components were observed in addition to the SiC substrate and the oxide layer. In the interface of the oxide layer formed on the (000$$bar{1}$$)$$_{C}$$ surface, Si$$^{1+}$$ component was small, higher oxidation number components were larger, and total amount od sub-oxides was larger comparing to that of the (000$$bar{1}$$)$$_{Si}$$ surface. A binding energy for oxide formed on the (000$$bar{1}$$)$$_{C}$$ surface was shifted to 0.22 eV higher side comparing to that of the (000$$bar{1}$$)$$_{Si}$$ surface. It indicates that band off-set of conduction band is small in the SiO$$_{2}$$/SiC interface.



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