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Chemical-state resolved depth-profiling using angle-resolved X-ray photoelectron spectroscopy and the maximum entropy method

Harries, J.; Tode, Mayumi; Sumimoto, Yuichi; Inoue, Keisuke; Yoshigoe, Akitaka ; Teraoka, Yuden

Using the high energy resolution surface chemistry apparatus at SPring-8's BL23SU it is possible to record angular and chemical-state resolved X-ray photoelectron spectra. Chemical-state specific depth profile information can be obtained from these spectra using the maximum entropy method. Here we describe progress made in the combination of these two techniques, with the specific example of the depth-profiling of various nitridation states present in a Al(111) sample nitrided using a supersonic molecular beam.

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