Synchrotron radiation photoemission study on native oxides of VCrTi alloy and its modification by deuterium ion implantation

Teraoka, Yuden; Harries, J.; Tode, Mayumi; Yoshigoe, Akitaka 

Native oxides of VCrTi alloy, their thermal stability and their modification via deuterium ion implantation have been investigated using synchrotron radiation photoemission spectroscopy. The oxide thickness was estimated to be 3 nm by photon energy dependence (600 eV - 1600 eV). Its thermal stability was investigated by flash heating from 473 K to 1173 K. O1s, C1s, V2p, Cr2p, and Ti2p were measured after cooling down below 373 K. Before heating, major peaks of metal oxides were observed at 1247 eV as well as minor peaks showing their bulk contribution. After only 473 K heating, the metal peaks grew with O1s decrease. The same kind experiments were performed for deuterized samples with dose of 2.810 cm. Photoemission peaks after 373 K heating were almost same as before heating in contrast to the non-ion-implanted sample. D desorption was observed by a mass spectrometer during 573 K heating. Consequently, the native oxide decomposeD thermally after D desorption.