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Synchrotron radiation photoemission study on native oxides of VCrTi alloy and its modification by deuterium ion implantation

VCrTi合金の自然酸化膜とその重水素イオン注入による改質に関する放射光光電子分光研究

寺岡 有殿; Harries, J.; 戸出 真由美; 吉越 章隆 

Teraoka, Yuden; Harries, J.; Tode, Mayumi; Yoshigoe, Akitaka

本研究ではVCrTi合金の自然酸化膜,その熱安定性,重水素イオン注入による表面改質について軟X線放射光を用いた光電子分光で調べた。自然酸化膜の膜厚は600eVから1600eVの範囲の放射光エネルギー依存性から3nmと見積もられた。自然酸化膜の熱安定性は473Kから1173Kの範囲でフラッシュ加熱によって評価された。O1s, C1s, V2p, Cr2p, Ti2pの光電子スペクトルが373K以下に下がってから測定された。加熱前にはV, Cr, Tiの酸化成分が弱いバルク成分とともに1247eVの放射光で観察された。わずかに473Kの加熱で、金属ピークが増大し、O1sピークは減少した。同様な実験が2.8$$times$$10$$^{15}$$cm$$^{-2}$$の重水素注入したVCrTi合金に対して行われた。イオン注入なしの試料と異なり、373K加熱後の光電子ピークは加熱前と変わらない。573Kまで加熱する間に重水素の脱離が質量分析器で観測された。自然酸化膜は重水素脱離の後で熱分解し始めると結論した。

Native oxides of VCrTi alloy, their thermal stability and their modification via deuterium ion implantation have been investigated using synchrotron radiation photoemission spectroscopy. The oxide thickness was estimated to be 3 nm by photon energy dependence (600 eV - 1600 eV). Its thermal stability was investigated by flash heating from 473 K to 1173 K. O1s, C1s, V2p, Cr2p, and Ti2p were measured after cooling down below 373 K. Before heating, major peaks of metal oxides were observed at 1247 eV as well as minor peaks showing their bulk contribution. After only 473 K heating, the metal peaks grew with O1s decrease. The same kind experiments were performed for deuterized samples with dose of 2.8$$times$$10$$^{15}$$ cm$$^{-2}$$. Photoemission peaks after 373 K heating were almost same as before heating in contrast to the non-ion-implanted sample. D$$_{2}$$ desorption was observed by a mass spectrometer during 573 K heating. Consequently, the native oxide decomposeD thermally after D$$_{2}$$ desorption.

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