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Report No.
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Metastable defects in low-energy electron irradiated n-type 4H-SiC

Beyer, F. C.*; Hemmingsson, C.*; Pedersen, H.*; Henry, A.*; Isoya, Junichi*; Morishita, Norio; Oshima, Takeshi; Janz$'e$n, E.*

By low-energy electron irradiation of epitaxial n-type 4H-SiC, the Deep Level Transient Spectroscopy (DLTS) peaks called the defects Z1/2 and EH6/7 were observed, which were also observed in as-grown layer and the commonly found peaks EH1 and EH3 (M-center) also appeared. New defect named the EB-centers increased after annealing out of EH1 and EH3. Since low energy electron irradiation (less than 220 keV) affects mainly the carbon atom in SiC, both the M- and EB-centers might be carbon related defects.

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