Metrology of wide field of view nano-thickness foils' homogeneity by conventional and phase contrast soft X-ray imaging

軟X線吸収像及び位相コントラスト像によるナノ薄膜の広範囲一様性計測法

Faenov, A. Y.; Pikuz, T.*; 福田 祐仁; 神門 正城; 小瀧 秀行; 本間 隆之; 川瀬 啓悟; Skobelev, I.*; Gasilov, S.*; 河内 哲哉; 大道 博行; 田島 俊樹*; 加藤 義章* ; Bulanov, S. V.

Faenov, A. Y.; Pikuz, T.*; Fukuda, Yuji; Kando, Masaki; Kotaki, Hideyuki; Homma, Takayuki; Kawase, Keigo; Skobelev, I.*; Gasilov, S.*; Kawachi, Tetsuya; Daido, Hiroyuki; Tajima, Toshiki*; Kato, Yoshiaki*; Bulanov, S. V.

New approach for phase-contrast imaging of nanostructures using compact femtosecond laser-produced cluster plasma devices. Novel ultrafast soft X-ray diagnostics and metrology of full areas of free standing or mesh supported nano- thickness foils or other nanostructures is demonstrated.