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Metrology of wide field of view nano-thickness foils' homogeneity by conventional and phase contrast soft X-ray imaging

Faenov, A. Y.; Pikuz, T.*; Fukuda, Yuji; Kando, Masaki; Kotaki, Hideyuki; Homma, Takayuki; Kawase, Keigo; Skobelev, I.*; Gasilov, S.*; Kawachi, Tetsuya; Daido, Hiroyuki; Tajima, Toshiki*; Kato, Yoshiaki* ; Bulanov, S. V.

New approach for phase-contrast imaging of nanostructures using compact femtosecond laser-produced cluster plasma devices. Novel ultrafast soft X-ray diagnostics and metrology of full areas of free standing or mesh supported nano- thickness foils or other nanostructures is demonstrated.

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Category:Physics, Applied

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