Technology of nano-/micro structure fabrication using high-energy ion beams and its applications

Kamiya, Tomihiro

The high-energy ion microbeam technology that controls various kinds of ion beams with the energy of MeV/amu or more at the micro nano level can provide the new fabrication methods making the best use of the feature of the interaction of high-energy ions with materials. It is necessary to advance the material development, the beam technology development, and the processing technology development, under the accumulation of a basic and systematic finding concerning the interaction of the ion beam and the material by collaboration of many scientists in various research fields.