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Report No.
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Evaluation of characteristics of the surface displacement measurement device by laser method

Ito, Masayasu ; Kawamata, Kazuo; Ishitsuka, Etsuo   

Surface state of material is measured by the surface displacement measurement device with laser displacement sensor. It is important to know the characteristic of a device that considers environment to use this device in the cell. Therefore, this report described about evaluation of characteristics of the device by laser method.

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