Mechanism of oxidation on Si(111)-77 surface enhanced by translational kinetic energy of O $_{2}$

Yoshigoe, Akitaka ; Teraoka, Yuden

We clarified the initial sticking probability of O $_{2}$ on Si(111)-77 surface varied with the translational kinetic energy of O $_{2}$ by observing the time evolution of the oxygen bonding configurations and the Si oxidation states. It is found that the reaction probability of the ins oxygen is dominantly changed by the translational kinetic energy O $_{2}$ .

Language	:	Japanese
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Meeting title	:	第23回日本放射光学会年会・放射光科学合同シンポジウム
Held date	:	2010/01
Location (city)	:	姫路
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	SPring-8(大型放射光施設)
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Registration No. : BB20092997
JAEA Abstracts No. :
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