軟X線照射による水素化DLC膜からの水素放出過程

Hydrogen desorption process from hydrogenated diamond-like carbon film by irradiation of soft X-ray

神田 一浩*; 寺岡 有殿; 戸出 真由美; 松井 真二*

Kanda, Kazuhiro*; Teraoka, Yuden; Tode, Mayumi; Matsui, Shinji*

軟X線照射によるダイヤモンドライク炭素(DLC)膜中の改質効果を調べるために、未照射の水素化DLC膜と軟X線照射(300mAh)した水素化DLC膜の昇温脱離スペクトル(TDS)を測定した。昇温は373Kから1073Kまで87.5K/minの速度で行った。水素分子のTDSでは、未照射の水素化DLC膜で470K付近に大きなピークが観測され、軟X線照射後の試料ではこのピークが見られない。弾性反跳分析によるDLC膜の水素量測定でも300mAhの照射で水素量は大きな減少を示した。これらの測定から、水素は300mAhの軟X線照射により脱離すると結論した。

In order to investigate soft X-ray irradiation effects for a diamond-like carbon (DLC) film, thermal desorption spectra (TDS) were observed for a hydrogenated DLC film and a soft X-ray irradiated (300 mAh) hydrogenated DLC film. The temperature elevation rate was 87.5 K/min and the temperature range was from 373 K to 1073 K. In the case of TDS for hydrogen molecules, a large peak was observed around 470 K in the hydrogenated DLC film. The peak, however, was not observed in the non-irradiated hydrogenated DLC film. The elastic recoil analysis showed a large decrease of hydrogen in the X-ray irradiated (300 mAh) sample. We concluded on the basis of these observations that hydrogen molecules desorb by soft X-ray irradiation of 300 mAh.