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Report No.

Focal spot characterization of EUVFEL using a LiF crystal detector

Fukuda, Yuji; Faenov, A. Y.; Pikuz, T. A.*; Ohashi, Haruhiko*; Semba, Yasunori*; Nagasono, Mitsuru*; Tono, Kensuke*; Togashi, Tadashi*; Yabashi, Makina*; Ishikawa, Tetsuya*

We have conducted detailed focused spot shape measurements for EUVFEL using a LiF crystal radiation detector. The single shot focused spot images were recorded on the LiF detector surface as a function of detector position. As a result, we found that the spot images were distorted due to aberrations, and that laser beam was focused about 1-mm up to the laser beam axis. Moreover, we found that the LiF crystal was ablated due to high intensity of the focused beam.



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