Pulse pitch dependence of electric conduction by fs-laser-modification on 6H-SiC substrates

Deki, Manato*; Ito, Takuto*; Yamamoto, Minoru*; Tomita, Takuro*; Matsuo, Shigeki*; Hashimoto, Shuichi*; Kitada, Takahiro*; Isu, Toshiro*; Onoda, Shinobu; Oshima, Takeshi

no abstracts in English

Language	:	Japanese
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Meeting title	:	シリコンカーバイド(SiC)及び関連ワイドギャップ半導体研究会第18回講演会
Held date	:	2009/12
Location (city)	:	神戸
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Registration No. : BB20093813
JAEA Abstracts No. :
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