Evaluation of electron irradiated semi-insulated 6H-SiC single crystal substrates

Miyazaki, Hisashi*; Morimoto, Jun*; Onoda, Shinobu; Oshima, Takeshi

no abstracts in English

Language	:	Japanese
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Meeting title	:	シリコンカーバイド(SiC)及び関連ワイドギャップ半導体研究会第19回講演会
Held date	:	2010/10
Location (city)	:	つくば
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	電子加速器
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Registration No. : BB20102389
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