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Soft error rate in SOI SRAM with technology node of 90 nm using oxygen ion probe

Abo, Satoshi*; Masuda, Naoyuki*; Wakaya, Fujio*; Takai, Mikio*; Hirao, Toshio; Onoda, Shinobu; Makino, Takahiro; Oshima, Takeshi; Iwamatsu, Toshiaki*; Oda, Hidekazu*

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