A Multilayer grating with a novel layer structure for a flat-field spectrograph attached to transmission electron microscopes in energy region of 2-4 keV

透過型電子顕微鏡に搭載可能な2-4keV用平面結像型分光器のための新規膜構造を持つ多層膜回折格子

今園 孝志; 小池 雅人; 小枝 勝*; 長野 哲也*; 笹井 浩行*; 大上 裕紀*; 米澤 善央*; 倉本 智史*; 寺内 正己*; 高橋 秀之*; 飯田 信雄*; 村野 孝訓*

Imazono, Takashi; Koike, Masato; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*; Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*

We have developed a compact wavelength-dispersive soft X-ray emission (SXE) spectrometer for TEM's. SXE spectroscopy combined with transmission electron microscopy (TEM-SXES) should be a hopeful method to reveal physical properties and chemical-bonding states of identified small specimen areas of various compounds. It is of importance to simultaneously detect and analyze SXE spectra between 2 keV and 4 keV. For this purpose, we invented a novel multilayer structure to be able to uniformly enhance the reflectivity in a few keV energy range at a fixed angle of incidence. The multilayer structure that consisted of W and BC was fabricated on the surface of a newly designed holographic laminar-type varied-line-spacing master grating. As a result of the measurement of diffraction efficiency of the new multilayer grating (MLG), it was revealed that the new MLG was effective to uniformly enhance the diffraction efficiency and worked practically in the 2-4 keV range.