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Report No.
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Development and performance test of a soft X-ray polarimeter and ellipsometer for complete polarization analysis

Imazono, Takashi; Sano, Kazuo*; Suzuki, Yoji; Kawachi, Tetsuya; Koike, Masato

A new apparatus for polarimetric and ellipsometric measurements based on the rotating-analyzer method in the soft X-ray region has been designed, constructed, and installed in the soft X-ray beamline BL-11 at the SR Center of Ritsumeikan University, Shiga, Japan. It can realize the optical configurations for the complete polarization analysis by using six independently movable drive shafts. A demonstration of the capabilities of the apparatus has been performed using Mo/Si multilayer polarizers deposited by an ion beam sputtering method. It is for the first time shown that the degree of linear polarization of monochromatized light from the BL-11 is approximately 87% at 92 eV since the beamline has been constructed.

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Category:Instruments & Instrumentation

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