Refine your search:     
Report No.
 - 

Picosecond soft-X-ray laser interferometer for probing nanometer surface structure

Ochi, Yoshihiro; Terakawa, Kota*; Hasegawa, Noboru; Yamamoto, Minoru*; Tomita, Takuro*; Kawachi, Tetsuya; Minami, Yasuo*; Nishikino, Masaharu; Imazono, Takashi; Ishino, Masahiko; Suemoto, Toru*

We have developed a soft X-ray laser interferometer based on the double Lloyd's mirror and obtained a single shot interferogram by a 7-ps pulse at the wavelength of 13.9 nm. Micrometer grooves with 5-nm depth were successfully reconstructed from the interferogram. The lateral and depth resolutions were estimated to be 1.5 $$mu$$m and better than 1 nm, respectively. This interferometer will be an attractive diagnostic device for observing transiently changing nano-scale deviations on solid surfaces.

Accesses

:

- Accesses

InCites™

:

Percentile:52.6

Category:Physics, Applied

Altmetrics

:

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.