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Synchrotron radiation photoemission study of Ge$$_{3}$$N$$_{4}$$/Ge structures formed by plasma nitridation

Hosoi, Takuji*; Kutsuki, Katsuhiro*; Okamoto, Gaku*; Yoshigoe, Akitaka ; Teraoka, Yuden; Shimura, Takayoshi*; Watanabe, Heiji*

Chemical bonding states and energy band alignment of pure germanium nitride (Ge$$_{3}$$N$$_{4}$$) formed on a Ge(100) substrate were characterized by synchrotron radiation photoemission spectroscopy (SR-PES). The core-level shift of 2.31 eV originating from Ge-N bonds (Ge$$^{4+}$$) with respect to the bulk Ge 3d$$_{5/2}$$ peak (Ge$$^{0+}$$) was determined. In situ SR-PES study on changes in Ge 3d, N 1s, and O 1s core-level spectra during thermal annealing revealed that oxidized surface layer on Ge$$_{3}$$N$$_{4}$$ could be selectively removed at around 773 K, which was 50 deg lower than the decomposition temperature of Ge$$_{3}$$N$$_{4}$$. The Ge$$_{3}$$N$$_{4}$$ energy bandgap of 3.68 eV was experimentally determined. The valence band offset at a Ge$$_{3}$$N$$_{4}$$/Ge(100) interface was also estimated to be 1.65 eV, and thus, the energy band alignment between Ge$$_{3}$$N$$_{4}$$ dielectrics and Ge substrate was determined.

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Category:Physics, Applied

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