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Laminar and blazed type holographic gratings for a versatile soft X-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range

Imazono, Takashi; Koike, Masato; Kawachi, Tetsuya; Hasegawa, Noboru; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*; Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Sano, Kazuo*

Laminar and blazed types holographic varied-line-spacing spherical gratings for use in a versatile soft X-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00$$^circ$$ incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the ${it K}$ emission spectrum of lithium ($$sim$$55 eV) for all gratings. Moreover, the ${it K}$ emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.



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