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Electrical conduction properties of femotosecond laser modified region on surface and inside of SiC

Ito, Takuto*; Onishi, Ryo*; Deki, Manato; Tomita, Takuro*; Matsuo, Shigeki*; Hashimoto, Shuichi*; Kitada, Takahiro*; Isu, Toshiro*; Onoda, Shinobu; Oshima, Takeshi

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