Plasma transition caused by change of gas using multiturn internal RF antenna

Yamauchi, Toshihiko; Hamajima, Takafumi*; Kobayashi, Seiji*; Kanno, Yoshinori*; Hiruta, Toshihito

We observed the different types of transition (direct, self-pulse, normal transition) using an internal multiturn antenna. Transition time increased in proportion to gas pressure, which was connected with the collision time. It is considered that the detailed observation of hot plasma ring in CCP is a key for the explanation of transition.

Language	:	English
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Meeting title	:	4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2012)
Held date	:	2012/03
Location (city)	:	Kasugai
Location (country)	:	Japan
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Keywords	:	no keyword
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Registration No. : BB20113167
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